Handbook of plasma processing technology by Jerome J. Haber, Stephen M. Rossnagel, William D. Westwood

Handbook of plasma processing technology



Download Handbook of plasma processing technology




Handbook of plasma processing technology Jerome J. Haber, Stephen M. Rossnagel, William D. Westwood
Language: English
Page: 535
Format: djvu
ISBN: 0815512201, 9780815512202
Publisher: William Andrew

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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